
| Measuring range | 300 x 200 x 200mm |
|---|---|
| W.D | Column 200mm (option 400mm)£¬Working distance 110mm |
| XY Base | Jinan Blue marble 00 grade |
| Main Base | Jinan Blue marble 00 grade |
| Stage glass Size/th> | 360 x280mm |
| Test weight | 35kg |
| Driveand movement | Hiwin P Linear guide |
| Magnetic movement | |
| NSK bearing | |
| PANASOIC SERVO MOTOR (DRIVE) | |
| XYZ resolution | X/Y£º0.0005mm |
| Z£º0.0005mm | |
| X/Y Accuracy(¥ìm) | ¡Â2.5+L/300 |
| Repetition accuracy (¥ìm) | ¡Â3.5 |
| Drive | 400mm/s |
| Panasonic CNC servo motor | |
| Xaixs 750W motor Yaixs 1500W motor Zaixs 1500W motor |
|
| CAMERA | HIKROBOT 1/3" High Resolution CCD(2000 x 1000) |
| SOFTWARE | INSPEC2D SMU (Input and output for MES,QMS) |
| Lens | Full Automatic lens Monitor resolution 30-328X (With navigator camera high FOV) |
| Illumination | |
| TOP(Surface) : 8 segment, 255LED White color | |
| Bottomm : LED, 255 led white color | |
| Size | 900 x 1050 x 1680 mm |
| Weight | 320 kg |
| Power | AC220V/50Hz- 60Hz |
| Software features | |
| points, straight lines, circles, arcs,ellipses, rectangles, grooves, Oshape ring, distance, angle, plane, open cloud line,closed cloudLineequal |
|
| 1.Measurement data can be exported to Excel,Word,AutoCAD, TXT2. When running a user program, data can be imported into Excel either in rows or column3. When importing into a report, software for you can choose whether to export graphics and bitmapRefer to the instructions below for fullautomatic layout specific functions |
|
| Environment | temperature : 20 -25 'c, relative humidity : 50% - 60% Less than vibration 0.002g |





| Suitable interface | Standard touch trigger interface e.g.PI4-2 |
|---|---|
| Sensor Directions | ¡¾ X, ¡¾Y, ¡¾ Z |
| Unidirectional Repeatability | 0.75 µm |
| Pretravel Variation(XY plane) | ¡¾1.5µm |
| Trigger Force (Fixed) | 12g |
| Stylus mount | M3 |
| Probe Status | LED |
| Probe signal connection | 5PIN DIN |
| Overtravel protection | Z 5 mm XY ¡¾20 degrees |


